Title :
A survey of automated material handling systems in 300-mm SemiconductorFabs
Author :
Agrawal, Gaurav K. ; Heragu, Sunderesh S.
Author_Institution :
Dept. of Decision Sci. & Eng. Syst., Rensselaer Polytech. Inst., Troy, NY, USA
Abstract :
The fast-paced developments and technological breakthroughs in the semiconductor manufacturing industry elevates the importance of optimum utilization of resources. The newer 300-mm wafers fabs place a high level of emphasis on increasing yield and reducing cycle times. Automated material handling systems are importanttools that help us achieve these objectives. In addition, due to the increased weight and size of 300-mm wafers, an automated material handling system isa must for a 300-mm manufacturing facility. This paper discusses various approaches for automated materials handling in semiconductor manufacturing industries.
Keywords :
factory automation; materials handling; semiconductor device manufacture; 300 mm; automated material handling systems; resources utilization; semiconductor fabs; semiconductor manufacturing industry; Contamination; Guidelines; Industrial engineering; Manufacturing automation; Manufacturing industries; Materials handling; Production facilities; Samarium; Semiconductor device manufacture; Systems engineering and theory; 300-mm semiconductor manufacturing; Automated material handling systems (AMHS); fab layouts; survey;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2005.863217
