A survey of automated material handling systems in 300-mm SemiconductorFabs

Author

Agrawal, Gaurav K. ; Heragu, Sunderesh S.

Author_Institution

Dept. of Decision Sci. & Eng. Syst., Rensselaer Polytech. Inst., Troy, NY, USA

Volume

19

Issue

1

fYear

2006

Firstpage

112

Lastpage

120

Abstract

The fast-paced developments and technological breakthroughs in the semiconductor manufacturing industry elevates the importance of optimum utilization of resources. The newer 300-mm wafers fabs place a high level of emphasis on increasing yield and reducing cycle times. Automated material handling systems are importanttools that help us achieve these objectives. In addition, due to the increased weight and size of 300-mm wafers, an automated material handling system isa must for a 300-mm manufacturing facility. This paper discusses various approaches for automated materials handling in semiconductor manufacturing industries.

Keywords

factory automation; materials handling; semiconductor device manufacture; 300 mm; automated material handling systems; resources utilization; semiconductor fabs; semiconductor manufacturing industry; Contamination; Guidelines; Industrial engineering; Manufacturing automation; Manufacturing industries; Materials handling; Production facilities; Samarium; Semiconductor device manufacture; Systems engineering and theory; 300-mm semiconductor manufacturing; Automated material handling systems (AMHS); fab layouts; survey;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2005.863217

Filename

1588868