Title :
Neutron irradiation effects on PZT thin films for nonvolatile-memory applications
Author :
Moore, R.A. ; Benedetto, J.M. ; McGarrity, J.M. ; McLean, F.B.
Author_Institution :
Harry Diamond Lab., Adelphi, MD, USA
fDate :
12/1/1991 12:00:00 AM
Abstract :
The authors examine the effects of neutron irradiation on ferroelectric (FE) lead-zirconate-titanate (PZT) thin films. The data show only a slight loss in the FE switched charge, as measured by the hysteresis loops, up to 1×1015 n/m2. The retained polarization, as measured by a pulse technique, showed a larger loss of remanent polarization which saturated at the lowest fluence measured (1×1013 n/cm2). However, in neither case does it appear that the film was degraded sufficiently to cause devices made from sol-gel PZT to fail at fluences at or below 1×10 15 n/cm2. The endurance characteristics of the film were unchanged due to neutron irradiation
Keywords :
dielectric hysteresis; dielectric polarisation; ferroelectric storage; ferroelectric thin films; lead compounds; neutron effects; PZT thin films; PbZrO3TiO3; endurance characteristics; ferroelectric film; hysteresis loops; neutron irradiation; nonvolatile-memory; pulse technique; remanent polarization loss; retained polarization; sol-gel PZT; Charge measurement; Current measurement; Ferroelectric materials; Hysteresis; Iron; Loss measurement; Neutrons; Polarization; Pulse measurements; Transistors;
Journal_Title :
Nuclear Science, IEEE Transactions on