DocumentCode :
815937
Title :
Effects of switched gate bias on radiation-induced interface trap formation [MOS transistors]
Author :
Saks, N.S. ; Brown, D.B. ; Rendell, R.W.
Author_Institution :
US Naval Res. Lab., Washington, DC, USA
Volume :
38
Issue :
6
fYear :
1991
fDate :
12/1/1991 12:00:00 AM
Firstpage :
1130
Lastpage :
1139
Abstract :
Switched gate bias experiments were used to test the hydrogen model for the time-dependent buildup of interface traps nit after a radiation pulse. In the hydrogen model, slow transport of radiation-induced H+ ions through the oxide to the Si/SiO2 interface is the rate-limiting step in the nit formation process. A model based on dispersive transport theory was used to numerically simulate the time-dependent H+ drift through the oxide toward the gate under negative bias, then back toward the Si/SiO2 interface under positive bias. Good agreement between the simulations and experiment is obtained for the final magnitude of ΔNit, both for positive and negative bias during irradiation. The procedure used for the numerical simulations provides only a lower bound on the transport time when the direction of the gate bias is switched during the Nit buildup. This behavior is due to a memory effect in the dispersive H+ transport
Keywords :
diffusion in solids; electron beam effects; insulated gate field effect transistors; interface electron states; semiconductor device testing; H+ ions; Si-SiO2 interface; dispersive transport theory; electron irradiation; memory effect; model; negative bias; numerical simulations; positive bias; radiation-induced interface trap formation; switched gate bias; time-dependent H+ drift; time-dependent buildup; transport time; Bonding; Dispersion; Electron traps; Hydrogen; Laboratories; MOSFETs; Numerical simulation; Paramagnetic resonance; Predictive models; Testing;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/23.124085
Filename :
124085
Link To Document :
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