Title :
Dosimetry in linac electron-beam environments [microelectronic packages]
Author :
Beutler, D.E. ; Lorence, L.J., Jr. ; Brown, D.B.
Author_Institution :
Sandia Nat. Lab., Albuquerque, NM, USA
fDate :
12/1/1991 12:00:00 AM
Abstract :
The relationship between dose in TLDs and dose in packaged microelectronic devices as a function of electron beam energy is calculated using the CEPXS/ONELD radiation transport code. The effects of adjacent materials, including TLDs, upon the energy deposition in the device are also discussed. The calculations indicate that dosimetry errors for linac electron beam environments (electron energies >12 MeV) can be made less than 5% if appropriate materials and geometries are used. The CEPXS/ONELD code provides a powerful tool for dosimetry analysis in electron-beam environments
Keywords :
dosimetry; electron beam effects; electronic engineering computing; integrated circuit testing; nuclear engineering computing; packaging; 6 to 60 MeV; CEPXS/ONELD radiation transport code; TLDs; dosimetry analysis; dosimetry errors; electron beam energy; energy deposition; linac electron-beam environments; packaged microelectronic devices; Absorption; Composite materials; Dosimetry; Electron beams; Laboratories; Linear particle accelerator; Microelectronics; Packaging; Performance evaluation; Testing;
Journal_Title :
Nuclear Science, IEEE Transactions on
