Title :
Ultrasensitive Nanomechanical Photonic Sensor Based on Horizontal Slot-Waveguide Resonator
Author :
Barrios, Carlos Angulo
Author_Institution :
ETSI Telecomunicacion, Univ. Politecnica de Madrid
Abstract :
A novel integrated nanomechanical optical sensor with ultrahigh sensitivity is presented. The photonic device consists of a silicon-based disk resonator formed by a horizontal slot-waveguide acting as a circular cantilever. The overall sensitivity results from the product of the sensitivities of the slot-waveguide and the disk resonator. Calculations indicate a sensitivity as high as 33 nm-1 , which is four orders of magnitude larger than that of state-of-the-art microcantilever sensors
Keywords :
integrated optics; micro-optics; micromechanical devices; nanotechnology; optical resonators; optical sensors; optical waveguides; silicon; circular cantilever; horizontal slot-waveguide resonator; nanomechanical photonic sensor; Biomedical optical imaging; Biosensors; Optical devices; Optical refraction; Optical resonators; Optical sensors; Optical variables control; Optoelectronic and photonic sensors; Silicon; Slabs; Integrated optics; microoptoelectromechanical systems; sensors; silicon technology;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.886824
