DocumentCode :
816549
Title :
The evaluation of copper migration during the die attach curing and second wire bonding process
Author :
Lin, T.Y. ; Pecht, Michael G. ; Das, Diganta ; Pan, Jisheng ; Wenhui, Zhu
Author_Institution :
Agere Syst. Singapore Pte. Ltd., Singapore
Volume :
28
Issue :
2
fYear :
2005
fDate :
6/1/2005 12:00:00 AM
Firstpage :
337
Lastpage :
344
Abstract :
Copper migration on the silver plated surface of the lead-frames with various heat treatments was evaluated by X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and atomic force microscopy (AFM) methodologies. Copper migration may introduce copper oxidation and result in the wedge bonding failures due to the nonstick on lead (NSOL) phenomenon. Experiments were performed on the two kinds of TQFP leadframes with the stamped and etched manufacturing processes subjected to various heat treatments and bonding conditions to understand the underlying physics. TEM and AFM provided the additional insight of the grain structure and surface roughness of silver. XPS results showed that the etched leadframe was relatively better one that less copper oxide was detected on the silver surface after annealing process. However, more copper was observed to diffuse onto the silver surface after annealing in the stamped leadframe. In comparison between the stamped and etched lead-frames, the silver plated layer in later one is more efficient in blocking copper diffusion-either surface or bulk. Finally a full factorial design of experiment (DOE) with wedge bond pull strength as response was performed to verify the results of XPS, TEM, and AFM. The evaluations based on XPS, TEM, and AFM analyzes can really help to improve the yield of the wedge bonding process and optimize the IC manufacturing process window.
Keywords :
X-ray photoelectron spectra; annealing; atomic force microscopy; copper; diffusion barriers; integrated circuit manufacture; lead bonding; silver; transmission electron microscopy; IC manufacturing process window; NSOL; TQFP leadframes; X-ray photoelectron spectroscopy; annealing process; atomic force microscopy; blocking copper diffusion; copper migration; copper oxidation; design of experiment; die attach curing; etched manufacturing processes; grain structure; heat treatments; nonstick on lead; second wire bonding process; silver plated surface; surface roughness; transmission electron microscopy; wedge bonding failures; wedge bonding process; Atomic force microscopy; Bonding processes; Copper; Curing; Etching; Microassembly; Rough surfaces; Silver; Surface treatment; Wire; Atomic force microscopy (AFM); X-ray photoelectron spectroscopy (XPS); design of experiment (DOE); nonstick on lead (NSOL); transmission electron microscopy (TEM);
fLanguage :
English
Journal_Title :
Components and Packaging Technologies, IEEE Transactions on
Publisher :
ieee
ISSN :
1521-3331
Type :
jour
DOI :
10.1109/TCAPT.2005.848494
Filename :
1432943
Link To Document :
بازگشت