Title :
Integrated-optic interferometer position sensor
Author :
Ura, Shogo ; Suhara, Toshiaki ; Nishihara, Hiroshi
Author_Institution :
Dept. of Electron., Osaka Univ., Japan
Abstract :
A fully integrated interferometer position/displacement sensor with direction-discrimination capability is discussed. The device is constructed by integrating three kinds of grating components and a pair of photodiodes in a glass waveguide on a silicon substrate and by butt-coupling a single-mode laser diode. Interference signals corresponding to mirror movement were obtained experimentally over a 15-cm range with a 0.39- mu m modulation period.<>
Keywords :
integrated optics; light interferometers; optical waveguides; photodiodes; spatial variables measurement; Si; displacement sensor; glass waveguide; integrated-optic interferometer position sensor; mirror movement; photodiodes; single-mode laser diode; Gratings; Integrated optics; Mirrors; Optical buffering; Optical coupling; Optical films; Optical interferometry; Optical sensors; Optical waveguides; Photodiodes;
Journal_Title :
Lightwave Technology, Journal of
