Title :
A Classification-Based Fault Detection and Isolation Scheme for the Ion Implanter
Author :
Lin, Shin-Yeu ; Horng, Shih-Cheng
Author_Institution :
Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu
Abstract :
We propose a classification-based fault detection and isolation scheme for the ion implanter. The proposed scheme consists of two parts: 1) the classification part and 2) the fault detection and isolation part. In the classification part, we propose a hybrid classification tree (HCT) with learning capability to classify the recipe of a working wafer in the ion implanter, and a k-fold cross-validation error is treated as the accuracy of the classification result. In the fault detection and isolation part, we propose a warning signal generation criteria based on the classification accuracy to detect and fault isolation scheme based on the HCT to isolate the actual fault of an ion implanter. We have compared the proposed classifier with the existing classification software and tested the validity of the proposed fault detection and isolation scheme for real cases to obtain successful results
Keywords :
fault location; ion implantation; pattern classification; pattern clustering; regression analysis; trees (mathematics); classification software; classification-based fault detection; classification-based fault isolation; clustering algorithm; hybrid classification tree; ion implanter; k-fold cross-validation error; regression tree; warning signal generation criteria; Classification tree analysis; Condition monitoring; Fault detection; Manufacturing processes; Mathematical model; Semiconductor device modeling; Signal generators; Software testing; Throughput; Voltage; Classification; classification and regression tree (CART); clustering algorithm; fault detection and isolation; ion implanter;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2006.883594
