• DocumentCode
    817093
  • Title

    Mask Cost and Profitability in Photomask Manufacturing: An Empirical Analysis

  • Author

    Weber, Charles M. ; Berglund, C. Neil ; Gabella, Patricia

  • Author_Institution
    Portland State Univ., OR
  • Volume
    19
  • Issue
    4
  • fYear
    2006
  • Firstpage
    465
  • Lastpage
    474
  • Abstract
    An empirical study of the economics of manufacturing photomasks concludes that the uncontrolled growth of optical proximity effect correction and resolution enhancement techniques is driving up the cost of pattern generation and mask inspection to levels that threaten the profitability of photomask manufacturing. The intrinsic cost of some leading edge photomasks has already exceeded the price that customers are willing to pay for them. A model of the lifecycle of photomask manufacturing, developed from interviews involving the 1990-to-2005 operations of six mask shops and a survey of seven photomask manufacturers, shows that design for manufacturability (DFM) constitutes the most promising approach for alleviating this market impasse. Unilateral action by mask shops to increase their capital productivity is necessary but insufficient and perhaps unaffordable. DFM solutions will require the majority of participants in the lithography value chain to collaborate according to a volatile demand schedule that is driven by semiconductor manufacturers
  • Keywords
    design for manufacture; life cycle costing; masks; pricing; profitability; semiconductor device manufacture; capital productivity; design for manufacturability; economics; lifecycle model; lithography value chain; mask inspection; optical proximity effect correction; pattern generation; photomask manufacturing; profitability; resolution enhancement techniques; semiconductor manufacture; Collaboration; Costs; Design for manufacture; Inspection; Job shop scheduling; Lithography; Productivity; Profitability; Proximity effect; Virtual manufacturing; Costs; manufacturing; mask; photomask; profitability;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2006.883577
  • Filename
    4012107