DocumentCode
817093
Title
Mask Cost and Profitability in Photomask Manufacturing: An Empirical Analysis
Author
Weber, Charles M. ; Berglund, C. Neil ; Gabella, Patricia
Author_Institution
Portland State Univ., OR
Volume
19
Issue
4
fYear
2006
Firstpage
465
Lastpage
474
Abstract
An empirical study of the economics of manufacturing photomasks concludes that the uncontrolled growth of optical proximity effect correction and resolution enhancement techniques is driving up the cost of pattern generation and mask inspection to levels that threaten the profitability of photomask manufacturing. The intrinsic cost of some leading edge photomasks has already exceeded the price that customers are willing to pay for them. A model of the lifecycle of photomask manufacturing, developed from interviews involving the 1990-to-2005 operations of six mask shops and a survey of seven photomask manufacturers, shows that design for manufacturability (DFM) constitutes the most promising approach for alleviating this market impasse. Unilateral action by mask shops to increase their capital productivity is necessary but insufficient and perhaps unaffordable. DFM solutions will require the majority of participants in the lithography value chain to collaborate according to a volatile demand schedule that is driven by semiconductor manufacturers
Keywords
design for manufacture; life cycle costing; masks; pricing; profitability; semiconductor device manufacture; capital productivity; design for manufacturability; economics; lifecycle model; lithography value chain; mask inspection; optical proximity effect correction; pattern generation; photomask manufacturing; profitability; resolution enhancement techniques; semiconductor manufacture; Collaboration; Costs; Design for manufacture; Inspection; Job shop scheduling; Lithography; Productivity; Profitability; Proximity effect; Virtual manufacturing; Costs; manufacturing; mask; photomask; profitability;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2006.883577
Filename
4012107
Link To Document