Title :
Mutual Capacitive Flexible Tactile Sensor for 3-D Image Control
Author :
Yung-Chen Wang ; Tsun-Yi Chen ; Rongshun Chen ; Cheng-Yao Lo
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This study develops a novel mutual capacitive tactile sensor for a touch panel with shifted finger-type electrodes with high sensitivity and other benefits. This tactile sensor detects normal, shear, and pulling forces with good simultaneous visible transmittance and flexibility for the next generation of 3-D flexible portable displays. The tactile sensor is composed of polyethylene terephthalate, gold, indium tin oxide, and polydimethylsiloxane. It exhibits 75% transmittance on average in the visible region, 0.04-N force resolution, and 1.5-pF/N responsiveness. The finger-type electrode design improves sensitivity by 112%-4100%, depending on the number of fingers and shifted direction. This study conducts theoretical calculations, simulations, fabrication, and measurements.
Keywords :
capacitive sensors; electrodes; gold; image sensors; indium compounds; optical variables control; tactile sensors; three-dimensional displays; tin compounds; 3D flexible portable displays; 3D image control; Au; ITO; finger-type electrode design; indium tin oxide; mutual capacitive flexible tactile sensor; polydimethylsiloxane; polyethylene terephthalate; pulling force; shear force; shifted finger-type electrodes; touch panel; visible transmittance; Arrays; Capacitance; Capacitors; Electrodes; Force; Resins; Tactile sensors; Flexible; normal force; pulling force; shear force; tactile sensor; touch panel;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2013.2245402