DocumentCode
818228
Title
Silicon lattice constant: limits in IMGC X-ray/optical interferometry
Author
Basile, Giuseppe ; Bergamin, Angelo ; Cavagnero, Giovanni ; Mana, Giovanni ; Vittone, Ettore ; Zosi, Gianfranco
Author_Institution
Instituto di Metrologia
Volume
40
Issue
2
fYear
1991
fDate
4/1/1991 12:00:00 AM
Firstpage
98
Lastpage
102
Keywords
Force measurement; Lattices; Optical interferometry; Optical refraction; Optical variables control; Refractive index; Shape measurement; Silicon; X-ray diffraction; X-ray lasers;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.1990.1032891
Filename
1032891
Link To Document