Title :
A combined X-ray and optical interferometer with a new translation stage
Author :
Nakayama, Kan ; Tanaka, Mitsuru ; Kuroda, Kazuaki
Author_Institution :
National Research Laboratory of Metrology
fDate :
4/1/1991 12:00:00 AM
Keywords :
Actuators; Fasteners; Frequency estimation; Lattices; Optical interferometry; Silicon; Vibration measurement; Volume measurement; Wavelength measurement; X-ray diffraction;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1990.1032893
