A Method to Determine LRRM Calibration Standards in Measurement Configurations Affected by Leakage

This paper presents a novel method to define the calibration standards for the line-reflect-reflect-match method in a reciprocal 16-term error network. The procedure is based on four two-port calibration measurements: a thru line, a pair of matches, and two pure reactance pairs. The line standard and the resistance of the match standard need to be exactly known. The reactances of the match and lossless open and short standards are found using their raw S-parameter measurement data. The algorithm is limited to second-tier calibration of a reciprocal error network with a pre-calibrated network analyzer. Detailed theory of the method is presented and its functionality is demonstrated by practical on-wafer measurements and simulation.