Aqueous-Base-Developable Benzocyclobutene (BCB)-Based Material Curable in Air

Author

So, Ying-Hung ; Stark, Edmund J. ; Li, Yongfu ; Kisting, Scott ; Achen, Albert ; Baranek, Kayla ; Scheck, Daniel ; Hetzner, Jack ; Folkenroth, Jason J. ; Topper, Michael ; Baumgartner, T.

Author_Institution

Dept. of Adv. Electron. Mater., Dow Chem. Co., Midland, MI

Volume

29

Issue

4

fYear

2006

Firstpage

741

Lastpage

750

Abstract

A positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material curable in air is described in this paper. The prepolymer is made from divinylsiloxane bisbenzocyclobutene (DVS-bisBCB) and BCB-acrylic acid. The formulation contains antioxidants that allow the prepolymer to cure in air and a diazonaphthaquinone to make it photosensitive. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the prepolymer produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as packaging applications and as a planarization or insulation layer in display applications

Keywords

curing; polymers; BCB acrylic acid; DVS-bisBCB; air curable; aqueous base developable; benzocyclobutene; diazonaphthaquinone; dielectric material; divinyl siloxane bisbenzocyclobutene; low cure temperature; photosensitive; positive tone; prepolymer; scum free; self priming; Chemicals; Dielectric materials; Displays; Microelectronics; Nitrogen; Optical buffering; Optical films; Packaging; Polymer films; Solvents; Air curable; aqueous-base-developable; benzocyclobutene (BCB); excellent resolution; low cure temperature; scum free; self-priming;

fLanguage

English

Journal_Title

Advanced Packaging, IEEE Transactions on

Publisher

ieee

ISSN

1521-3323

Type

jour

DOI

10.1109/TADVP.2006.884840

Filename

4012263