Title :
Magnetic properties of Fe-Co/Fe-Co-N multilayered films with high saturation flux density
Author :
Ono, Hideaki ; Fujinaga, Masashi ; Yonemoto, Takaharu ; Miyagawa, Tsugio
Author_Institution :
RIMES Ltd., Chiba, Japan
fDate :
9/1/1992 12:00:00 AM
Abstract :
Fe-Co/Fe-Co-N multilayered films were prepared by an alternation of RF-sputtering and electron cyclotron resonance (ECR) plasma nitridation, and the structure and magnetic properties of each were investigated. N2 ECR plasma exposure generated nitride (ε or ζ nitride) phases with low saturation flux density on the sputtered Fe-Co layers´ surface. In these multilayered films, fine crystal grains and an expansion of the BCC (body centered cubic) lattice parameter were observed. For the optimum preparation conditions, Fe97.2Co2.8/Fe97.2Co2.8-N multilayered films demonstrated a high saturation flux density of B s=2.0 T, a low coercivity of Hc=120 A/m, and a relative permeability of μ´>2200 at 20 MHz
Keywords :
cobalt alloys; coercive force; ferromagnetic properties of substances; iron alloys; lattice constants; magnetic flux; magnetic multilayers; magnetic permeability; nitridation; sputtered coatings; ζ nitride; 20 MHz; BCC lattice parameter; ECR plasma nitridation; Fe97.2Co2.8-Fe97.2Co2.8 N multilayered films; RF-sputtering; coercivity; epsilon nitride; fine crystal grains; high saturation flux density; magnetic properties; relative permeability; structure; Coercive force; Cyclotrons; Electrons; Iron; Lattices; Magnetic films; Magnetic properties; Magnetic resonance; Plasma density; Plasma properties;
Journal_Title :
Magnetics, IEEE Transactions on
