DocumentCode
819121
Title
A PIG Sputter Source for Negative Ions
Author
Andersen, H.H. ; Tykesson, P.
Author_Institution
Institute of Physics, University of Aarhus DK-8000 Aarhus C, Denmark
Volume
22
Issue
3
fYear
1975
fDate
6/1/1975 12:00:00 AM
Firstpage
1632
Lastpage
1636
Abstract
A PIG discharge with radial extraction and a separate sputtering cathode placed opposite to the outlet has been built. To increase the yield of negatively sputtered ions, cesium is vapourized into the discharge. Magnetically analyzed spectra of the extracted beams prove, together with other evidence, that the extracted ions are those directly sputtered. Among others, the following analyzed beams have been obtained: C- - 7 ¿A, F- - 15 ¿A, Al- - 1 ¿A Al-2 - 2.0 ¿A, Cl- - 30 ¿A, Ta- -3 ¿A, and Au- - 59 ¿A. With 10 ¿A injected into our tandem accelerator, a 2.4 ¿A Au++ beam was obtained.
Keywords
Acceleration; Cathodes; Electrons; Fault location; Gaussian processes; Magnetic analysis; Particle beams; Physics; Plasma sources; Sputtering;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1975.4327952
Filename
4327952
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