Templating and Replication of Spiral Photonic Crystals for Silicon Photonics

Author

Seet, Kock Khuen ; Mizeikis, Vygantas ; Kannari, Kenta ; Juodkazis, Saulius ; Misawa, Hiroaki ; Tétreault, Nicolas ; John, Sajeev

Author_Institution

Hokkaido Univ., Sapporo

Volume

14

Issue

4

fYear

2008

Firstpage

1064

Lastpage

1073

Abstract

This paper describes femtosecond laser lithography of 3-D photonic crystal templates in commercial photoresist SU-8 and replication of these templates with silicon. Using this approach, silicon-based photonic crystals having 3-D square spiral architecture and exhibiting photonic stop gaps near the 2.5- mum wavelength were fabricated. Possibilities to use a multiple-beam interference technique for two-photon absorption templating of photonic crystals are explored.

Keywords

high-speed optical techniques; integrated optics; optical fabrication; photonic band gap; photonic crystals; photoresists; replica techniques; two-photon processes; SU-8 photoresist; femtosecond laser lithography; integrated optics; multiple-beam interference technique; optical fabrication; photonic stop gaps; replication; silicon photonics; spiral photonic crystals; two-photon absorption templating; Interference; Lead; Lithography; Photonic crystals; Refractive index; Resists; Semiconductor materials; Silicon; Spirals; Ultrafast optics; Femtosecond laser lithography; photonic band gap materials; silicon;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2008.922909

Filename

4582394