Characterization of magnetic multilayers by grazing incidence X-ray reflectivity

Author

Tanner, B.K. ; Hudson, J.M.

Author_Institution

Dept. of Phys., Durham Univ., UK

Volume

28

Issue

5

fYear

1992

fDate

9/1/1992 12:00:00 AM

Firstpage

2736

Lastpage

2741

Abstract

The application of grazing incidence X-ray reflectivity measurements to the characterization of metallic multilayers is described. Use of simulation permits interface roughness to be determined to a precision of about 0.1 nm r.m.s. (root mean square) from the specular reflectivity profile. Measurement of the diffuse scatter permits interdiffusion to be distinguished in principle from interface roughness. Localization of strong diffuse scatter around the Bragg peaks of superlattices provides evidence for coherency in the roughness through the superlattice thickness

Keywords

X-ray applications; interface structure; magnetic multilayers; reflectometry; surface topography measurement; Bragg peaks; characterization; diffuse scatter; grazing incidence X-ray reflectivity; interdiffusion; interface roughness; magnetic multilayers; metallic multilayers; roughness measurement; specular reflectivity profile; superlattice thickness; Couplings; Electrons; Giant magnetoresistance; Instruments; Magnetic multilayers; Optical films; Reflectivity; Reflectometry; Thickness measurement; X-ray scattering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.179613

Filename

179613