Title :
Characterization of magnetic multilayers by grazing incidence X-ray reflectivity
Author :
Tanner, B.K. ; Hudson, J.M.
Author_Institution :
Dept. of Phys., Durham Univ., UK
fDate :
9/1/1992 12:00:00 AM
Abstract :
The application of grazing incidence X-ray reflectivity measurements to the characterization of metallic multilayers is described. Use of simulation permits interface roughness to be determined to a precision of about 0.1 nm r.m.s. (root mean square) from the specular reflectivity profile. Measurement of the diffuse scatter permits interdiffusion to be distinguished in principle from interface roughness. Localization of strong diffuse scatter around the Bragg peaks of superlattices provides evidence for coherency in the roughness through the superlattice thickness
Keywords :
X-ray applications; interface structure; magnetic multilayers; reflectometry; surface topography measurement; Bragg peaks; characterization; diffuse scatter; grazing incidence X-ray reflectivity; interdiffusion; interface roughness; magnetic multilayers; metallic multilayers; roughness measurement; specular reflectivity profile; superlattice thickness; Couplings; Electrons; Giant magnetoresistance; Instruments; Magnetic multilayers; Optical films; Reflectivity; Reflectometry; Thickness measurement; X-ray scattering;
Journal_Title :
Magnetics, IEEE Transactions on
