Sensitivity and resolution of evanescent microwave microscope

Author

Kleismit, Richard A. ; Kazimierczuk, Marian K. ; Kozlowski, Gregory

Author_Institution

Dept. of Electr. Eng., Wright State Univ., Dayton, OH, USA

Volume

54

Issue

2

fYear

2006

Firstpage

639

Lastpage

647

Abstract

A near-field evanescent microwave microscope is based on a λ/4 coaxial TEM transmission-line resonator with a silver-plated tungsten tip extending through an end-wall aperture. This microwave microscope is used to characterize local electromagnetic properties of dielectrics, conductors, and superconductors. The resolution of the probe is verified experimentally by scanning etched gold lines on a sapphire substrate. A first-order sensitivity estimation generated from a unified equivalent circuit model of the probe and sample is investigated. The sensitivity inherent to the resonant probe and system noise is discussed. Experimental validation of sensitivity is given.

Keywords

gold; materials testing; microwave imaging; microwave measurement; nondestructive testing; resonators; sapphire; sensitivity analysis; silver; transmission electron microscopy; transmission lines; tungsten; Al₂O₃; Au; W; coaxial TEM transmission-line resonators; complex permittivity; first-order sensitivity estimation; near-field evanescent microwave microscope; nondestructive evaluation; resonant probe; silver-plated tungsten tip; unified equivalent circuit model; Apertures; Coaxial components; Conductors; Dielectric substrates; Etching; Probes; Superconductivity; Transmission electron microscopy; Transmission lines; Tungsten; Complex permittivity; evanescent microwave microscopy; near-field; nondestructive evaluation; resolution; sensitivity; sensor; superconductors;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2005.862668

Filename

1589488