Title :
Sensitivity and resolution of evanescent microwave microscope
Author :
Kleismit, Richard A. ; Kazimierczuk, Marian K. ; Kozlowski, Gregory
Author_Institution :
Dept. of Electr. Eng., Wright State Univ., Dayton, OH, USA
Abstract :
A near-field evanescent microwave microscope is based on a λ/4 coaxial TEM transmission-line resonator with a silver-plated tungsten tip extending through an end-wall aperture. This microwave microscope is used to characterize local electromagnetic properties of dielectrics, conductors, and superconductors. The resolution of the probe is verified experimentally by scanning etched gold lines on a sapphire substrate. A first-order sensitivity estimation generated from a unified equivalent circuit model of the probe and sample is investigated. The sensitivity inherent to the resonant probe and system noise is discussed. Experimental validation of sensitivity is given.
Keywords :
gold; materials testing; microwave imaging; microwave measurement; nondestructive testing; resonators; sapphire; sensitivity analysis; silver; transmission electron microscopy; transmission lines; tungsten; Al2O3; Au; W; coaxial TEM transmission-line resonators; complex permittivity; first-order sensitivity estimation; near-field evanescent microwave microscope; nondestructive evaluation; resonant probe; silver-plated tungsten tip; unified equivalent circuit model; Apertures; Coaxial components; Conductors; Dielectric substrates; Etching; Probes; Superconductivity; Transmission electron microscopy; Transmission lines; Tungsten; Complex permittivity; evanescent microwave microscopy; near-field; nondestructive evaluation; resolution; sensitivity; sensor; superconductors;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2005.862668
