DocumentCode

822099

Title

2002 best paper award

Author

Lay Lay Lee ; Schaper, C.D. ; Weng Khuen Ho

Author_Institution

Stanford University

Volume

16

Issue

4

fYear

2003

Firstpage

573

Lastpage

574

Keywords

Awards;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2003.818954

Filename

1243965