DocumentCode :
822099
Title :
2002 best paper award
Author :
Lay Lay Lee ; Schaper, C.D. ; Weng Khuen Ho
Author_Institution :
Stanford University
Volume :
16
Issue :
4
fYear :
2003
Firstpage :
573
Lastpage :
574
Keywords :
Awards;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2003.818954
Filename :
1243965
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=822099
