DocumentCode :
822216
Title :
A study of variable EWMA controller
Author :
Tseng, Sheng-Tsaing ; Yeh, Arthur B. ; Tsung, Fugee ; Chan, Yun-Yu
Author_Institution :
Inst. of Stat., Nat. Tsing-Hua Univ., Hsinchu, Taiwan
Volume :
16
Issue :
4
fYear :
2003
Firstpage :
633
Lastpage :
643
Abstract :
The exponentially weighted moving average (EWMA) feedback controller (with a fixed discount factor) is a popular run by run control scheme which primarily uses data from past process runs to adjust settings for the next run. Although the EWMA controller with a small discount factor can guarantee a long-term stability (under fairly regular conditions), it usually requires a moderately large number of runs to bring the output of a process to its target. This is impractical for process with small batches. The reason is that the output deviations are usually very large at the beginning of the first few runs and, as a result, the output may be out of process specifications. In order to reduce a possibly high rework rate, the authors propose a variable discount factor to tackle the problem. They state the main results in which the stability conditions and the optimal variable discount factor of the proposed EWMA controller are derived. An example is given to demonstrate the performance. Moreover, a heuristic is proposed to simplify the computation of the variable discount factor. It is seen that the proposed method is easy to implement and provides a good approximation to the optimal variable discount factor.
Keywords :
controllers; feedback; moving average processes; process control; exponentially weighted moving average feedback controller; run-by-run process control; stability analysis; variable discount factor; Automatic control; Etching; Feedback control; Input variables; Manufacturing processes; Mechanical variables control; Process control; Size control; Stability; Statistics;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2003.818960
Filename :
1243976
Link To Document :
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