Title :
The effects of substrate and bias on CoNiCr/Cr thin films
Author :
Deng, Youping ; Lambeth, David N. ; Laughlin, David E.
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
9/1/1992 12:00:00 AM
Abstract :
The magnetic properties and microstructural characteristics of CoNiCr/Cr films with thin Cr underlayers prepared on both single-crystal Si and glass substrates are discussed. It is found that {200} crystallographic texture is easily obtained for Cr films prepared on Si at room temperature. Substrate bias during the Cr deposition, however, changes the Cr {200} texture to {110}. Substrate bias during the CoNiCr deposition degrades the texture of the Cr underlayer
Keywords :
chromium; chromium alloys; cobalt alloys; coercive force; crystal microstructure; ferromagnetic properties of substances; magnetic recording; magnetic thin films; nickel alloys; sputtered coatings; storage media; substrates; texture; CoNiCr deposition; CoNiCr-Cr thin films; Cr deposition; crystallographic texture; glass substrates; magnetic properties; microstructural characteristics; room temperature; single crystal Si substrate; substrate bias effects; thin Cr underlayers; Chromium; Glass; Magnetic films; Magnetic properties; Radio frequency; Semiconductor films; Sputtering; Substrates; Transistors; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
