The effects of substrate and bias on CoNiCr/Cr thin films

Author

Deng, Youping ; Lambeth, David N. ; Laughlin, David E.

Author_Institution

Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

28

Issue

5

fYear

1992

fDate

9/1/1992 12:00:00 AM

Firstpage

3096

Lastpage

3098

Abstract

The magnetic properties and microstructural characteristics of CoNiCr/Cr films with thin Cr underlayers prepared on both single-crystal Si and glass substrates are discussed. It is found that {200} crystallographic texture is easily obtained for Cr films prepared on Si at room temperature. Substrate bias during the Cr deposition, however, changes the Cr {200} texture to {110}. Substrate bias during the CoNiCr deposition degrades the texture of the Cr underlayer

Keywords

chromium; chromium alloys; cobalt alloys; coercive force; crystal microstructure; ferromagnetic properties of substances; magnetic recording; magnetic thin films; nickel alloys; sputtered coatings; storage media; substrates; texture; CoNiCr deposition; CoNiCr-Cr thin films; Cr deposition; crystallographic texture; glass substrates; magnetic properties; microstructural characteristics; room temperature; single crystal Si substrate; substrate bias effects; thin Cr underlayers; Chromium; Glass; Magnetic films; Magnetic properties; Radio frequency; Semiconductor films; Sputtering; Substrates; Transistors; X-ray diffraction;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.179724

Filename

179724