Title :
Preparation of Co ferrite thin films with large perpendicular and in-plane coercivities by facing targets sputtering
Author :
Matsushita, Nobuhiro ; Nakagawa, Shigeki ; Naoe, Masahiko
Author_Institution :
Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan
fDate :
9/1/1992 12:00:00 AM
Abstract :
Thin films with cobalt ferrite layer on ZnO underlayer were prepared at substrate temperature Ts in the range of 80~600°C by a facing targets sputtering apparatus. Crystallites in specimen films revealed almost perfect orientation of (111) plane even at Ts as low as 80°C. Coercivity Hc and saturation magnetization Ms were strongly dependent on Ts. Hc exhibited maximum and minimum values of 3300 and 400 Oe at Ts of 300 and 600°C, respectively. Ms increased with increase of Ts and was 367 emu/c3 at Ts at 600°C. It is concluded that these films should be applicable to magnetic recording disks with ultra-high density
Keywords :
cobalt compounds; coercive force; ferrimagnetic properties of substances; ferrites; hard discs; magnetic recording; magnetic thin films; sputter deposition; sputtered coatings; 80 to 600 degC; Co ferrite thin films; CoFe2O4-ZnO; ZnO underlayer; facing targets sputtering; in-plane coercivity; magnetic recording disks; perpendicular coercivity; saturation magnetization; substrate temperature; ultra-high density; Cobalt; Coercive force; Crystallization; Ferrite films; Magnetic films; Magnetic recording; Saturation magnetization; Sputtering; Temperature distribution; Zinc oxide;
Journal_Title :
Magnetics, IEEE Transactions on
