Preparation of Co ferrite thin films with large perpendicular and in-plane coercivities by facing targets sputtering

Author

Matsushita, Nobuhiro ; Nakagawa, Shigeki ; Naoe, Masahiko

Author_Institution

Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan

Volume

28

Issue

5

fYear

1992

fDate

9/1/1992 12:00:00 AM

Firstpage

3108

Lastpage

3110

Abstract

Thin films with cobalt ferrite layer on ZnO underlayer were prepared at substrate temperature T_s in the range of 80~600°C by a facing targets sputtering apparatus. Crystallites in specimen films revealed almost perfect orientation of (111) plane even at T_s as low as 80°C. Coercivity H_c and saturation magnetization M_s were strongly dependent on T_s. H_c exhibited maximum and minimum values of 3300 and 400 Oe at T_s of 300 and 600°C, respectively. M_s increased with increase of T_s and was 367 emu/c³ at T_s at 600°C. It is concluded that these films should be applicable to magnetic recording disks with ultra-high density

Keywords

cobalt compounds; coercive force; ferrimagnetic properties of substances; ferrites; hard discs; magnetic recording; magnetic thin films; sputter deposition; sputtered coatings; 80 to 600 degC; Co ferrite thin films; CoFe₂O₄-ZnO; ZnO underlayer; facing targets sputtering; in-plane coercivity; magnetic recording disks; perpendicular coercivity; saturation magnetization; substrate temperature; ultra-high density; Cobalt; Coercive force; Crystallization; Ferrite films; Magnetic films; Magnetic recording; Saturation magnetization; Sputtering; Temperature distribution; Zinc oxide;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.179728

Filename

179728