• DocumentCode
    823638
  • Title

    Development of the Inverted Sputter Source

  • Author

    Chapman, K.R.

  • Author_Institution
    Department of Physics, The Florida State University Tallahassee, Florida 32306
  • Volume
    23
  • Issue
    2
  • fYear
    1976
  • fDate
    4/1/1976 12:00:00 AM
  • Firstpage
    1109
  • Lastpage
    1112
  • Abstract
    A sputter source is described in which the beam is extracted through the ionizer. This gives a very compact source with easily changed cones. The beam transmissions through an electrostatic accelerator are good and life times of in excess of a month between services are normal.
  • Keywords
    Brightness; Electrostatics; Ion accelerators; Laboratories; Particle beams; Physics; Production; Space charge; Testing; Voltage;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1976.4328415
  • Filename
    4328415
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=823638