Title :
Development of the Inverted Sputter Source
Author_Institution :
Department of Physics, The Florida State University Tallahassee, Florida 32306
fDate :
4/1/1976 12:00:00 AM
Abstract :
A sputter source is described in which the beam is extracted through the ionizer. This gives a very compact source with easily changed cones. The beam transmissions through an electrostatic accelerator are good and life times of in excess of a month between services are normal.
Keywords :
Brightness; Electrostatics; Ion accelerators; Laboratories; Particle beams; Physics; Production; Space charge; Testing; Voltage;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1976.4328415
