DocumentCode
824670
Title
New Developments in Defect Studies in Semiconductors
Author
Kimerling, L.C.
Author_Institution
Bell Laboratories Murray Hill, New Jersey
Volume
23
Issue
6
fYear
1976
Firstpage
1497
Lastpage
1505
Keywords
Capacitance; Instruments; Scanning electron microscopy; Schottky barriers; Signal processing; Solids; Spectroscopy; Temperature dependence; Transient analysis; Working environment noise;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1976.4328529
Filename
4328529
Link To Document