Title :
Ratio for polycrystalline silicon used in disk-shaped microresonators
Abstract :
Integrated circuit technology has been used to fabricate miniature disk resonators of polycrystalline silicon that operate at frequencies above 100 MHz. The ratios of low-order resonant frequencies in these resonators can be used to determine the value of Poisson´s ratio and to confirm assumptions regarding homogeneity and isotropy.
Keywords :
Poisson ratio; discs (structures); elemental semiconductors; integrated circuit technology; micromechanical resonators; silicon; Poisson ratio; Si; disk-shaped microresonators; homogeneity; integrated circuit technology; isotropy; low-order resonant frequencies; Circuits; Electronic mail; Fabrication; Frequency measurement; Grain size; Microcavities; Micromechanical devices; Resonant frequency; Silicon; Vibration measurement; Computer Simulation; Crystallization; Elasticity; Equipment Design; Equipment Failure Analysis; Models, Chemical; Silicon; Stress, Mechanical; Transducers; Vibration;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.1593363
