A Semicylindrical Capacitive Sensor With Interface Circuit Used for Flow Rate Measurement

Author

Chiang, Cheng-Ta ; Huang, Yu-Chung

Author_Institution

Meas. Techniques Lab., Nat. Chiao Tung Univ., Hsinchu

Volume

6

Issue

6

fYear

2006

Firstpage

1564

Lastpage

1570

Abstract

In this paper, a semicylindrical capacitive sensor with an interface circuit used for flow rate measurement is proposed. The numerical analysis method to calculate the capacitance of the semicylindrical capacitive sensor is analyzed and discussed. The picofarad-range capacitive variation of the semicylindrical capacitive sensor can be detected and converted into voltage variation by the interface circuit. Besides, the interface circuit is compact enough to simplify the circuit complexity and could be easily implemented for flow rate measurement. All the functions of the capacitive sensing method of the semicylindrical capacitive sensor used for flow rate measurement are proved successfully through HSPICE simulation. Measurement results have successfully confirmed the correct functions and performance of the semicylindrical capacitive sensor with an interface circuit used for flow rate measurement, which ranges from 0.136 to 4.746 L/min, on the liquid crystal display panel coating machine

Keywords

SPICE; capacitive sensors; flow measurement; flow sensors; numerical analysis; HSPICE simulation; flow rate measurement; interface circuit; liquid crystal display; numerical analysis method; picofarad-range capacitive variation; semicylindrical capacitive sensor; switched capacitor; Capacitance; Capacitive sensors; Circuit simulation; Coatings; Complexity theory; Dielectrics; Fluid flow measurement; Liquid crystal displays; Numerical analysis; Voltage; Capacitive sensor; HSPICE; flow rate measurement; interface circuit; liquid crystal display (LCD); switched capacitor;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2006.883847

Filename

4014148