Title :
Nanosized Metal-Oxide Semiconducting
Oxygen Gas Sensors for Low-Temperature Application
Author :
Hu, Ying ; Tan, Ooi Kiang ; Zhu, Weiguang
Author_Institution :
Sensors & Actuators Lab., Nanyang Technol. Univ., Singapore
Abstract :
The X-ray diffraction and transmission electron microscope results show that nanosized-SrTi1plusmnxO3-delta material series (27 nm) with perovskite structure can be synthesized using the high-energy ball milling technique. The thick-film screen-printed nanosized-SrTi1plusmnxO3-delta-based sensor series with annealing temperature of 400 degC are found to have good oxygen-sensing property at near human-body temperature for the first time for such a low temperature. The effect of the deviating stoichiometry of the nanosized-SrTi1plusmnxO3-delta -based sensors on their sensing properties was also investigated. The optimal relative resistance (Rnitrogen/R20%oxygen ) value of 6.35 was obtained by a nanosized-SrTiO3-delta -based sensor at 40 degC operating temperature. Their near human-body operating temperature is much lower than that of the conventional low-temperature semiconducting oxygen gas sensors (300degC-500degC) and SrTiO3 oxygen sensors (>700degC). This can extend the application of the semiconducting oxygen gas sensors from the conventional high and medium temperature to the lower operating temperature areas such as the medical, environmental, and domestic fields, etc
Keywords :
annealing; ball milling; cryogenic electronics; gas sensors; nanostructured materials; oxygen; stoichiometry; strontium compounds; titanium compounds; 27 nm; 40 C; 400 C; SrTiO; X-ray diffraction; annealing; deviating stoichiometry effect; high-energy ball milling technique; low-temperature application; nanosized material; nanosized metal-oxide semiconducting oxygen gas sensors; oxygen-sensing property; perovskite structure; thick-film screen-printed nanosized sensor; transmission electron microscope; Annealing; Ball milling; Gas detectors; Semiconductivity; Semiconductor materials; Temperature sensors; Thick film sensors; Transmission electron microscopy; X-ray diffraction; X-ray imaging; Low-temperature sensing property; mechanism analysis; nanosized-$hbox{SrTi}_{1 pm x}hbox{O}_{3 - delta}$; the deviating stoichiometry effect;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2006.884449