Effect of Thin Film Thicknesses and Materials on the Response of RTDs and Microthermocouples

Author

Imran, Muhammad ; Bhattacharyya, Abhijit

Author_Institution

Dept. of Appl. Sci., Arkansas Univ., Little Rock, AR

Volume

6

Issue

6

fYear

2006

Firstpage

1459

Lastpage

1467

Abstract

Fabrication and thermal characterization of a resistance temperature detector (RTD) heater and microthermocouples (MTs) on silicon substrates have been reported in this paper. The influence of film thickness and nickel-gold (Au) electroplating on RTD on its steady-state temperature with respect to its steady-state electrical power input and resistance is studied. Further, the thermal effects of multiple thermocouples in a thermopile as well as the effects of Au layers in the contact pads of the thermopiles on their open-circuit Seebeck voltage are studied. Therein lies the novelty of this paper. The in situ operating relationships for the RTD heater and the MT are provided

Keywords

Seebeck effect; electroplating; resistance thermometers; semiconductor thin films; silicon; thermocouples; thermopiles; NiAu-Si; RTD heater; electroplating; microthermocouples; open-circuit Seebeck voltage; resistance temperature detector; steady-state temperature; thermal characterization; thermal effects; thermopile; thin film materials; thin film thicknesses; Detectors; Electric resistance; Fabrication; Gold; Resistance heating; Silicon; Steady-state; Temperature; Thermal resistance; Transistors; Microthermocouple (MT); relative Seebeck coefficient (RSC); resistance temperature detector (RTD);

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2006.884167

Filename

4014167