Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

Author

Link, M. ; Schreiter, Matthias ; Weber, Jens ; Primig, R. ; Pitzer, D. ; Gabl, R.

Author_Institution

Siemens AG, Munich, Germany

Volume

53

Issue

2

fYear

2006

Firstpage

492

Lastpage

496

Abstract

Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used. Coupling factors k² of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.

Keywords

II-VI semiconductors; Q-factor; acoustic resonators; semiconductor thin films; sputter deposition; wide band gap semiconductors; zinc compounds; 850 MHz; Q-factors; ZnO; film bulk acoustic resonators; modified reactive magnetron sputtering; shear vibration mode; thin films; Biosensors; Fabrication; Film bulk acoustic resonators; Liquids; Q factor; Sensor arrays; Sputtering; Substrates; Surface acoustic wave devices; Zinc oxide; Biosensing Techniques; Complex Mixtures; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Solutions; Transducers; Zinc Oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.1593389

Filename

1593389