Title :
Effect of critical dimension variation on SAW correlator energy
Author :
Skinner, J.L. ; Cardinale, G.F. ; Talin, A. Alec ; Brocato, R.W.
Author_Institution :
Sandia Nat. Labs., Livermore, CA, USA
Abstract :
The effect of critical dimension (CD) variation and metallization ratio on the efficiency of energy conversion of a surface acoustic wave (SAW) correlator is examined. We find that a 10% variation in the width of finger electrodes predicts only a 1% decrease in the efficiency of energy conversion. Furthermore, our model predicts that a metallization ratio of 0.74 represents an optimum value for energy extraction from the SAW by the interdigitated transducer (IDT).
Keywords :
acoustic transducers; correlators; metallisation; signal processing; surface acoustic wave devices; SAW correlator energy; critical dimension variation; interdigitated transducer; metallization ratio; surface acoustic wave; Correlators; Energy conversion; Frequency response; Laboratories; Radio frequency; SAW filters; Sensor systems; Surface acoustic wave devices; Surface acoustic waves; Wireless sensor networks; Acoustics; Biosensing Techniques; Energy Transfer; Equipment Design; Equipment Failure Analysis; Microelectrodes; Reproducibility of Results; Sensitivity and Specificity; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.1593390
