Title :
Thin Epitaxial Silicon for De/Dx Detectors
Author :
Maggiore, C.J. ; Goldstone, P.D. ; Gruhn, C.R. ; Jarmie, Nelson ; Stotlar, S.C. ; DeHaven, H.V.
Abstract :
The techniques for fabricating thin self-supporting epitaxial films for dE/dx detectors have been studied. Detectors having thicknesses between 1 and 4 ¿m with areas of 12.5 mm2 have been fabricated and tested. The response of the detectors has been studied with alpha particles, oxygen ions, and fission fragments.
Keywords :
Alpha particles; Conductivity; Epitaxial layers; Etching; Fabrication; Probes; Radiation detectors; Schottky barriers; Silicon; Substrates;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1977.4328650
