• DocumentCode
    826532
  • Title

    LotTrack: RFID-based process control in the semiconductor industry

  • Author

    Thiesse, Frédéric ; Fleisch, Elgar ; Dierkes, Markus

  • Author_Institution
    Inst. for Technol. Manage., Univ. of St. Gallen, Switzerland
  • Volume
    5
  • Issue
    1
  • fYear
    2006
  • Firstpage
    47
  • Lastpage
    53
  • Abstract
    We describe the design and implementation of a real-time localization solution that Infineon Technologies uses in its wafer fabrication facility in Villach, Austria. The system combines active RFID, passive RFID, and ultrasound sensors to track plastic wafer boxes and wafer cassettes in the company´s chip-manufacturing process.
  • Keywords
    clean rooms; mobile computing; process control; radiofrequency identification; semiconductor device manufacture; ultrasonic applications; Infineon Technologies; LotTrack; active RFID; chip-manufacturing process; passive RFID; process control; real-time localization; semiconductor industry; ultrasound sensors; wafer fabrication facility; Electronics industry; Fabrication; Industrial control; Logistics; Passive RFID tags; Process control; Production systems; Radiofrequency identification; Real time systems; Ultrasonic imaging; Mobile Applications; Pervasive Computing;
  • fLanguage
    English
  • Journal_Title
    Pervasive Computing, IEEE
  • Publisher
    ieee
  • ISSN
    1536-1268
  • Type

    jour

  • DOI
    10.1109/MPRV.2006.9
  • Filename
    1593571
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=826532