Title :
LotTrack: RFID-based process control in the semiconductor industry
Author :
Thiesse, Frédéric ; Fleisch, Elgar ; Dierkes, Markus
Author_Institution :
Inst. for Technol. Manage., Univ. of St. Gallen, Switzerland
Abstract :
We describe the design and implementation of a real-time localization solution that Infineon Technologies uses in its wafer fabrication facility in Villach, Austria. The system combines active RFID, passive RFID, and ultrasound sensors to track plastic wafer boxes and wafer cassettes in the company´s chip-manufacturing process.
Keywords :
clean rooms; mobile computing; process control; radiofrequency identification; semiconductor device manufacture; ultrasonic applications; Infineon Technologies; LotTrack; active RFID; chip-manufacturing process; passive RFID; process control; real-time localization; semiconductor industry; ultrasound sensors; wafer fabrication facility; Electronics industry; Fabrication; Industrial control; Logistics; Passive RFID tags; Process control; Production systems; Radiofrequency identification; Real time systems; Ultrasonic imaging; Mobile Applications; Pervasive Computing;
Journal_Title :
Pervasive Computing, IEEE
DOI :
10.1109/MPRV.2006.9
