Title :
High-temperature fiber-tip pressure sensor
Author :
Zhu, Yizheng ; Cooper, Kristie L. ; Pickrell, Gary R. ; Wang, Anbo
Author_Institution :
Bradley Dept. of Electr. & Comput. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA
Abstract :
This paper presents a miniature fiber-optic high-temperature pressure sensor fabricated on the tip of a singlemode (SM) fiber by means of fusion splicing, cleaving, and wet chemical etching. A new approach was developed to simplify the fabrication and greatly improve the sensitivity. The sensor is made entirely of fused silica, whose high-temperature sensing capability is explored in detail for the first time. Two sensors were tested up to 611°C and 710°C, respectively, showing excellent repeatability better than 0.62% and 1.4%. The maximum operating temperature is limited by the mechanical creep of the fused silica diaphragm.
Keywords :
creep; etching; fibre optic sensors; high-temperature techniques; micro-optics; micromechanical devices; microsensors; optical fibre fabrication; pressure sensors; silicon compounds; splicing; 611 degC; 710 degC; SiO2; cleaving; fiber sensitivity; fiber-tip sensor; fused silica diaphragm; fusion splicing; high-temperature pressure sensor; mechanical creep; miniature sensor; single-mode fiber fabrication; wet chemical etching; Chemical sensors; Fabrication; Mechanical sensors; Optical fiber sensors; Optical fiber testing; Samarium; Sensor fusion; Silicon compounds; Splicing; Wet etching; Fabry–PÉrot (FP) interferometer; fiber-optic sensor; high temperature; miniature; pressure sensor;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2005.862444
