Title :
RF MEMS phase shifters based on PCB MEMS technology
Author :
Ramadoss, R. ; Sundaram, A. ; Feldner, L.M.
Author_Institution :
Electr. & Comput. Eng. Dept., Auburn Univ., AL, USA
fDate :
5/26/2005 12:00:00 AM
Abstract :
An X-band main-line type loaded line RF MEMS phase shifter fabricated using printed circuit based MEMS technology is reported. The phase shifter provides a phase shift of 31.6° with a minimum insertion loss of 0.56 dB at 9 GHz for an applied DC bias voltage of 40 V. These phase shifters are suitable for monolithic integration with low-cost phased arrays on Teflon or Polyimide such as low dielectric constant substrates.
Keywords :
MMIC phase shifters; micromechanical devices; printed circuits; 0.56 dB; 40 V; 9 GHz; PCB MEMS technology; RF MEMS phase shifters; Teflon; X-band phase shifter; low dielectric constant substrates; low-cost phased arrays; main-line type loaded line phase shifter; monolithic integration; polyimide; printed circuit board;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20051074
