• DocumentCode
    83
  • Title

    Anti-symmetric flexural modes for the detection of humidity variation

  • Author

    Po-Hsien Tung ; Che-Hua Yang

  • Author_Institution
    Inst. of Mechatron. Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan
  • Volume
    60
  • Issue
    4
  • fYear
    2013
  • fDate
    Apr-13
  • Firstpage
    771
  • Lastpage
    776
  • Abstract
    Antisymmetric flexural (ASF) modes are guided acoustic modes propagating along the apex line of a wedge with particle motion that is antisymmetric about the midplane bisecting the apex angle. This paper describes experimental observations in applying ASF modes for the detection of moisture variation. In our setup, the wedge tip is coated with a thin layer of hygroscopic film for the absorption of moisture, so the phase velocity of the ASF mode is influenced by the changing humidity of the surrounding air. Enhanced by the wedge tip geometry, mass-loading effects on the ASF velocity resulting from the absorption of humidity are pronounced in a low-frequency regime of 0.2 to 2.0 MHz. Numerical models based on finite element analysis are constructed to explain the humidity sensing mechanism.
  • Keywords
    absorption; acoustic transducers; finite element analysis; humidity measurement; humidity sensors; thin film sensors; ASF; antisymmetric flexural mode; finite element analysis; frequency 0.2 MHz to 2 MHz; guided acoustic mode propagation; humidity absorption; humidity sensing mechanism; humidity variation detection; hygroscopic thin film layer; mass-loading effect; midplane bisection; moisture absorption; moisture variation detection; numerical model; particle motion; phase velocity; wedge apex line; wedge tip coating; wedge tip geometry;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2013.2625
  • Filename
    6489811