Title :
Design and optimization of a MEMS electret-based capacitive energy scavenger
Author :
Peano, Fabio ; Tambosso, Tiziana
Author_Institution :
Dipt. di Energetica, Politecnico di Torino, Italy
fDate :
6/1/2005 12:00:00 AM
Abstract :
In this paper, a method for the design and optimization of an electret-based vibration-to-electric microconverter is presented, using a nonlinear dynamical model of the device. The dynamics of the converter is analyzed in detail, showing the importance of properly accounting for the nonlinearity in the optimization process. A procedure to determine a set of optimization parameters is finally presented.
Keywords :
convertors; direct energy conversion; electrets; micromechanical devices; nonlinear dynamical systems; small electric machines; MEMS electret-based capacitive energy scavenger; capacity converters; energy harvesting; nonlinear dynamical model; optimization process; vibration-to-electric microconverter; Capacitance; Capacitors; Design optimization; Electrets; Electrodes; Equations; Equivalent circuits; Fingers; Micromechanical devices; Voltage; Capacity converters; electret; energy harvesting; microelectromechanical systems (MEMS);
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2005.844803
