A refractive free-space microoptical 4 x 4 interconnect on chip level with optical fan-out fabricated by the LIGA technique

Author

Voigt, S. ; Kufner, S. ; Kufner, M. ; Frese, I.

Author_Institution

Inst. for Mikrotechnik, Mainz Univ., Germany

Volume

14

Issue

10

fYear

2002

Firstpage

1484

Lastpage

1486

Abstract

A parallel purely refractive 4/spl times/4 optical data link has been built. The design is based on pairs of crossed cylindrical microlenses. The optical module is fabricated and monolithically integrated in. polymethyl methacrylate (PMMA) by the LIGA technique.

Keywords

LIGA; aspherical optics; integrated circuit interconnections; integrated optoelectronics; micro-optics; microlenses; optical design techniques; optical fabrication; optical interconnections; optical polymers; optical receivers; optical transmitters; 4 by 4 interconnect; LIGA technique; PMMA; aspherical design; bridging elements; chip level; crossed cylindrical microlenses; design; integrated circuit interconnections; microlens array elements; micromirrors; monolithic integration; optical data communication; optical fan-out; optical module; parallel purely refractive 4/spl times/4 optical data link; polymethyl methacrylate; receiver arrays; refractive free-space microoptical 4/spl times/4 interconnect; transmitter arrays; Integrated circuit interconnections; Lenses; Microoptics; Optical arrays; Optical crosstalk; Optical device fabrication; Optical interconnections; Optical receivers; Optical refraction; Optical transmitters;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2002.801834

Filename

1037558