DocumentCode
831657
Title
Insect-like microrobots with external skeletons
Author
Shimoyama, Lsao ; Miura, Hirofumi ; Suzuki, Kenji ; Ezura, Yuichi
Author_Institution
Dept. of Mechano-Inf., Tokyo Univ., Japan
Volume
13
Issue
1
fYear
1993
Firstpage
37
Lastpage
41
Abstract
A microrobot with an external skeleton like that of an insect is proposed. The microrobot can be implemented using rigid plates and elastic joints. A large scale model consisting of plastic plates, springs and solenoids is shown to demonstrate its motion. Several microsized models have been built on silicon wafers, using polysilicon as rigid plates and polyimide as elastic joints.<>
Keywords
micromechanical devices; robots; Si wafers; elastic joints; microrobot; model; polyimide; polysilicon; robotics; solenoids; Insects; Joints; Large-scale systems; Plastics; Polyimides; Semiconductor device modeling; Silicon; Skeleton; Solenoids; Springs;
fLanguage
English
Journal_Title
Control Systems, IEEE
Publisher
ieee
ISSN
1066-033X
Type
jour
DOI
10.1109/37.184791
Filename
184791
Link To Document