DocumentCode
832145
Title
Simulation and Fabrication of a Convective Gyroscope
Author
Dau, Van Thanh ; Dao, Dzung Viet ; Shiozawa, Tatsuo ; Sugiyama, Susumu
Author_Institution
Grad. Sch. of Sci. & Eng., Ritsumeikan Univ., Kusatsu
Volume
8
Issue
9
fYear
2008
Firstpage
1530
Lastpage
1538
Abstract
In this paper, we present the simulation and fabrication of the gas gyroscope. The gas flow inside the hermetically packed sensor is simulated by utilizing 3-D transient compressible flow analysis. The pump working principle and the effect of the Coriolis acceleration on the laminar jet are validated by both analytical formulas and experiments. The sensor utilizes a new sensing element consisting of a thermistor heated by an interior heater, which is independently power-supplied. The sensor performance can be adjusted by the applied voltage on the heater. Both heater and thermistor are optimized in terms of thermal stress. The effect of thermal stress in a p-type silicon thermistor reduces the performance of sensor by 9.5%. The sensor has been calibrated and the role of the heater is verified.
Keywords
Coriolis force; aerodynamics; compressible flow; convection; elemental semiconductors; gyroscopes; heating elements; jets; laminar flow; micropumps; microsensors; silicon; thermal stresses; thermistors; 3-D transient compressible flow analysis; Coriolis acceleration effect; MEMS process; Si; convective gyroscope fabrication; gas flow; gas gyroscope simulation; heater; hermetically packed sensor; laminar jet; p-type silicon thermistor; pump working principle; sensor calibration; sensor performance; thermal stress effect; thermistor heating; Analytical models; Fabrication; Fluid flow; Gas detectors; Gyroscopes; Hermetic seals; Thermal sensors; Thermal stresses; Thermistors; Transient analysis; Convective gyroscope; dual axis; transient analysis;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2008.925457
Filename
4598878
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