• DocumentCode
    832284
  • Title

    Modelling and application of elastomer mesh for microwave probing

  • Author

    Jayabalan, J. ; Ooi, B.-L. ; Leong, M.S. ; Iyer, M.K.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
  • Volume
    153
  • Issue
    1
  • fYear
    2006
  • Firstpage
    83
  • Lastpage
    88
  • Abstract
    A novel microwave probing application using elastomer mesh is described. It is targeted for testing wafer level packages with very fine pitch of the order of 100 micron and large pin counts of the order of a thousand. The metallised elastomer mesh provides mechanical compliance as well as good electrical contact. A mesh-coplanar probe is modelled by the partial element equivalent circuit (PEEC) method. The model is verified through frequency domain measurements on a prototype test fixture.
  • Keywords
    coplanar transmission lines; coplanar waveguides; elastomers; electrical contacts; equivalent circuits; fixtures; frequency-domain analysis; microwave measurement; semiconductor device testing; PEEC method; elastomer mesh modeling; electrical contact; frequency domain measurement; mesh-coplanar probe; microwave probing; partial element equivalent circuit; prototype test fixture;
  • fLanguage
    English
  • Journal_Title
    Microwaves, Antennas and Propagation, IEE Proceedings
  • Publisher
    iet
  • ISSN
    1350-2417
  • Type

    jour

  • DOI
    10.1049/ip-map:20050113
  • Filename
    1595914
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=832284