• DocumentCode
    832365
  • Title

    Wet etching of proton-exchanged lithium niobate-a novel processing technique

  • Author

    Laurell, Fredrik ; Webjörn, Jonas ; Arvidsson, Gunnar ; Holmberg, Johan

  • Author_Institution
    Inst. of Opt. Res., Stockholm, Sweden
  • Volume
    10
  • Issue
    11
  • fYear
    1992
  • fDate
    11/1/1992 12:00:00 AM
  • Firstpage
    1606
  • Lastpage
    1609
  • Abstract
    A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures
  • Keywords
    etching; integrated optics; ion exchange; lithium compounds; optical waveguides; optical workshop techniques; HNO3-HF mixture; processing technique; proton exchanged LiNbO3; proton exchanged areas; three-dimensional structures; wet etching; Annealing; Hafnium; Integrated optics; Laser ablation; Lithium niobate; Optical surface waves; Optical waveguides; Protons; Stress; Wet etching;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/50.184899
  • Filename
    184899
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=832365