Title :
Wet etching of proton-exchanged lithium niobate-a novel processing technique
Author :
Laurell, Fredrik ; Webjörn, Jonas ; Arvidsson, Gunnar ; Holmberg, Johan
Author_Institution :
Inst. of Opt. Res., Stockholm, Sweden
fDate :
11/1/1992 12:00:00 AM
Abstract :
A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures
Keywords :
etching; integrated optics; ion exchange; lithium compounds; optical waveguides; optical workshop techniques; HNO3-HF mixture; processing technique; proton exchanged LiNbO3; proton exchanged areas; three-dimensional structures; wet etching; Annealing; Hafnium; Integrated optics; Laser ablation; Lithium niobate; Optical surface waves; Optical waveguides; Protons; Stress; Wet etching;
Journal_Title :
Lightwave Technology, Journal of
