Single-mode, phosphorus-doped silica waveguides in silicon V-grooves

Author

Narendra, R. ; McMullin, J.N.

Author_Institution

TR Labs., Edmonton, Alta., Canada

Volume

5

Issue

1

fYear

1993

Firstpage

43

Lastpage

46

Abstract

Single-mode, phosphorus-doped glass waveguides have been formed in silicon V-grooves by chemical vapor deposition. The fabrication process is reproducible, involves few steps, and produces waveguides with a loss on the order of 0.1 dB/cm at a wavelength of 0.633 mu m. These waveguides are compatible with passive V-groove fiber alignment and out-of-plane coupling from integrated taps and end facets to surface-mounted optoelectronic devices.<>

Keywords

chemical vapour deposition; integrated optics; integrated optoelectronics; optical glass; optical losses; optical waveguides; optical workshop techniques; phosphosilicate glasses; 0.1 dB; 0.633 micron; Si; SiO/sub 2/-P/sub 2/O/sub 5/; SiO/sub 2/:P; chemical vapor deposition; end facets; fabrication process; integrated taps; out-of-plane coupling; passive V-groove fiber alignment; single mode glass:P waveguides; surface-mounted optoelectronic devices; Chemical vapor deposition; Etching; Glass; High speed optical techniques; Optical device fabrication; Optical surface waves; Optical waveguides; Planar waveguides; Silicon compounds; Surface waves;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.185055

Filename

185055