Title :
Numerical Modeling of Electron Beams Accelerated by the Radio Frequency Boundary Sheath
Author :
Heil, Brian G. ; Schulze, Julian ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter ; Czarnetzki, Uwe
Author_Institution :
Inst. fur Experimentalphys. V, Ruhr-Univ. Bochum, Bochum
Abstract :
The stochastic heating of electrons by the radio frequency boundary sheath in capacitively coupled plasmas is not completely understood or at least agreed upon by researchers. To aid in understanding this phenomena, a conceptually simple simulation of electron heating is presented. A fluid model is used to calculate the electric fields in the discharge, and a Monte Carlo simulation is used to calculate electron distribution functions. The plots of the density of energetic electrons are presented in this paper. They show electron beams that have been accelerated by the sheath.
Keywords :
Monte Carlo methods; discharges (electric); electron beams; plasma radiofrequency heating; plasma sheaths; Monte Carlo simulation; capacitively coupled plasmas; discharge; electron beams acceleration; electron distribution function; electron heating; energetic electron density; radio frequency boundary sheath; stochastic heating; Acceleration; Distribution functions; Electron beams; Heating; Numerical models; Plasma accelerators; Plasma sheaths; Plasma simulation; Radio frequency; Stochastic processes; Electron beams; plasma devices; plasma heating; plasma sheaths; plasmas;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2004.924575