• DocumentCode
    833356
  • Title

    Space-and Time-Resolved E–H Transition in an Inductively Coupled Plasma in Ar

  • Author

    Hirao, Satoshi ; Hayashi, Yuichiro ; Makabe, Toshiaki

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Keio Univ., Yokohama
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    1410
  • Lastpage
    1411
  • Abstract
    Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
  • Keywords
    argon; plasma diagnostics; plasma properties; Ar; E-mode; H-mode; inductively coupled plasma; integrated 2-D emission image; intensified charge coupled device; optical emission spectroscopy; plasma production; space-resolved E-H transition; temporal transition; time-resolved E-H transition; Argon; Cameras; Charge-coupled image sensors; Coils; Plasma devices; Plasma measurements; Plasma sources; Production; Spectroscopy; Stimulated emission; E–H transition; inductively coupled plasmas (ICPs); optical emission spectroscopy (OES);
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.924551
  • Filename
    4599010
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=833356