Title :
Space-and Time-Resolved E–H Transition in an Inductively Coupled Plasma in Ar
Author :
Hirao, Satoshi ; Hayashi, Yuichiro ; Makabe, Toshiaki
Author_Institution :
Dept. of Electron. & Electr. Eng., Keio Univ., Yokohama
Abstract :
Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
Keywords :
argon; plasma diagnostics; plasma properties; Ar; E-mode; H-mode; inductively coupled plasma; integrated 2-D emission image; intensified charge coupled device; optical emission spectroscopy; plasma production; space-resolved E-H transition; temporal transition; time-resolved E-H transition; Argon; Cameras; Charge-coupled image sensors; Coils; Plasma devices; Plasma measurements; Plasma sources; Production; Spectroscopy; Stimulated emission; E–H transition; inductively coupled plasmas (ICPs); optical emission spectroscopy (OES);
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.924551
