Diamond-Shaped Microplasma Device Using Thick Photoresist as a Barrier Rib in Ne–Ar Gas Mixtures

Author

Kim, Sung-O

Author_Institution

Dept. of Photonics, Nat. Chiao Tung Univ., Hsinchu

Volume

36

Issue

4

fYear

2008

Firstpage

1242

Lastpage

1243

Abstract

The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon-1% argon, and neon-5% argon gas mixtures are investigated. The 5 times 5 arrays of diamond-shaped microplasma devices operating at pressures from 300 to 800 torr have been characterized. The diamond-shaped microplasma devices, offer advantages such as having a high yield process, low ignition voltage, stable glow discharge, and low cost. The electrical properties of neon discharges have been examined with different argon fractions. The diamond-shaped microplasma device operates at voltages as low as 190 V, at 800 torr.

Keywords

argon; discharges (electric); gas mixtures; neon; photoresists; plasma devices; Ne-Ar; Ne-Ar gas mixtures; barrier rib; diamond-shaped microplasma device; discharge characteristics; electrical properties; neon-1% argon; neon-5% argon; pressure 300 torr to 800 torr; pure neon; thick photoresist; voltage 190 V; Argon; Biomedical electrodes; Glass; Glow discharges; Low voltage; Micromechanical devices; Optical devices; Plasma devices; Resists; Scanning electron microscopy; Glow discharge; microdischarge;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2008.922936

Filename

4599027