• DocumentCode
    833555
  • Title

    Simple two-dimensional numerical solution method for SAW-semiconductor device simulations

  • Author

    Haartsen, J.C. ; Venema, A.

  • Author_Institution
    Delft Univ. of Technol., Netherlands
  • Volume
    25
  • Issue
    7
  • fYear
    1989
  • fDate
    3/30/1989 12:00:00 AM
  • Firstpage
    465
  • Lastpage
    467
  • Abstract
    A computational technique to determine the electrical properties of SAW-semiconductor devices is presented. The contribution of the acoustic waves is reduced to a surface charge at the interface between the piezoelectric layer and the semiconducting substrate. In this way the electrical problem can be solved with numerical techniques commonly used for device modelling.
  • Keywords
    numerical methods; semiconductor device models; surface acoustic wave devices; SAW-semiconductor devices; computational technique; device modelling; electrical properties; numerical techniques; piezoelectric layer; surface charge; two-dimensional numerical solution method;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19890320
  • Filename
    18518
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=833555