• DocumentCode
    833627
  • Title

    Simulation and Visualization of Self-Assembled Nanodevice Networks Synthesized via Plasma–Surface Interaction

  • Author

    Levchenko, Igor ; Ostrikov, Kostya ; Cvelbar, Uros

  • Author_Institution
    Sch. of Phys., Sydney Univ., Sydney, NSW
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    866
  • Lastpage
    867
  • Abstract
    Using advanced visualization techniques, a comprehensive visualization of all the stages of the self-organized growth of internetworked nanostructures on plasma-exposed surface has been made. Atomistic kinetic Monte Carlo simulation for the initial stage of deposition, with 3-D visualization of the whole system and half-tone visualization of the density field of the adsorbed atoms, makes it possible to implement a multiscale predictive modeling of the development of the nanoscale system.
  • Keywords
    Monte Carlo methods; nanoelectronics; plasma interactions; plasma simulation; self-assembly; Monte Carlo simulation; nanostructures; plasma-surface interaction; self-assembled nanodevice networks synthesis; Atomic layer deposition; Internet; Kinetic theory; Nanostructures; Network synthesis; Plasma density; Plasma simulation; Predictive models; Self-assembly; Visualization; Nanodevice; plasma–surface interaction; self-assembly;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.924408
  • Filename
    4599037