DocumentCode
833627
Title
Simulation and Visualization of Self-Assembled Nanodevice Networks Synthesized via Plasma–Surface Interaction
Author
Levchenko, Igor ; Ostrikov, Kostya ; Cvelbar, Uros
Author_Institution
Sch. of Phys., Sydney Univ., Sydney, NSW
Volume
36
Issue
4
fYear
2008
Firstpage
866
Lastpage
867
Abstract
Using advanced visualization techniques, a comprehensive visualization of all the stages of the self-organized growth of internetworked nanostructures on plasma-exposed surface has been made. Atomistic kinetic Monte Carlo simulation for the initial stage of deposition, with 3-D visualization of the whole system and half-tone visualization of the density field of the adsorbed atoms, makes it possible to implement a multiscale predictive modeling of the development of the nanoscale system.
Keywords
Monte Carlo methods; nanoelectronics; plasma interactions; plasma simulation; self-assembly; Monte Carlo simulation; nanostructures; plasma-surface interaction; self-assembled nanodevice networks synthesis; Atomic layer deposition; Internet; Kinetic theory; Nanostructures; Network synthesis; Plasma density; Plasma simulation; Predictive models; Self-assembly; Visualization; Nanodevice; plasma–surface interaction; self-assembly;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2008.924408
Filename
4599037
Link To Document