• DocumentCode
    833697
  • Title

    Simultaneous thickness and group index measurement using optical low-coherence reflectometry

  • Author

    Sorin, W.V. ; Gray, D.F.

  • Author_Institution
    Hewlett-Packard Lab., Palo Alto, CA, USA
  • Volume
    4
  • Issue
    1
  • fYear
    1992
  • Firstpage
    105
  • Lastpage
    107
  • Abstract
    Using high-resolution optical reflectometry, group index and physical thickness can both be determined by precisely measuring optical time delays through a sample. Optical low-coherence reflectometry offers both the high-spatial resolution and large dynamic range required to perform accurate measurements using this technique.<>
  • Keywords
    light coherence; optical resolving power; reflectometry; refractive index measurement; thickness measurement; accurate measurements; group index measurement; high-resolution optical reflectometry; high-spatial resolution; large dynamic range; low-coherence reflectometry; optical low-coherence reflectometry; optical time delays; refractive index measurement; thickness measurement; Electron optics; Gallium arsenide; HEMTs; Mirrors; Optical control; Optical devices; Optical interferometry; Optical mixing; Reflectometry; Thickness measurement;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/68.124892
  • Filename
    124892
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=833697