DocumentCode
833777
Title
Development and characterization of micromachined hollow cathode plasma display devices
Author
Chen, Jack ; Park, Sung-Jin ; Fan, Zhifang ; Eden, J. Gary ; Liu, Chang
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Volume
11
Issue
5
fYear
2002
fDate
10/1/2002 12:00:00 AM
Firstpage
536
Lastpage
543
Abstract
In this paper, we report the development of hollow cathode micro plasma devices made using micromachining techniques. Compared with larger discharge devices, micromachined discharge devices operate at much higher pressures, up to 1 atm. Linear current-voltage relationships are obtained, potentially simplifying the control electronics for such devices. The size of micromachined discharge units is reduced and the distribution of sizes and light intensity in an array is more uniform relative to previous devices.
Keywords
cathodes; glow discharges; micromachining; plasma displays; control electronics; hollow cathode plasma display devices; light intensity; linear current-voltage relationships; micromachined discharge devices; micromachining techniques; Acceleration; Associate members; Cathodes; Electrons; Fault location; Glow discharges; Lifting equipment; Plasma devices; Plasma displays; Voltage;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2002.802907
Filename
1038849
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